Excimer Laser Repair

We are an expert service provider for the EXCIMER Laser system.

We offer service of re-marketing, repairs service, 308nm excimer laser refurbishments, and relocation services. Established the RD Lab Center and workshop in Taiwan. Warehouse for excimer laser spare parts stock.

Technology Service Item:

• Excimer Laser tube refurbish and Repair service

• Excimer Laser system Refurbishment and Retrofit

• Excimer Laser system relocation service

• Excimer Laser equipment parts trading

• Customized Spare parts development

Laser Equipment Model:

• Lambda Steel series LS1000

• Lambda SX excimer laser series SX315C, SX200C

• VYPER Series Laser

Excimer Laser Repair/Refurbishment Item:

• Excimer Laser Discharge Chambers (LDU)

• Output Coupler Lens (OC Lens)

• Laser beam shutter

• Laser beam dump

• High Voltage Power Supply Repair (TDK Lambda LC1202L)

• Gas module

• Blower motor controller

• Cryopump / Gas purify unit (GP)

• Hand-held terminal (HHT) / Keba KeTop C50

Other miscellaneous parts:

• Ultra 10 workstation

• Optics, Lens A / B / C

• ASML, NIKON, CANON parts improvement

• LC1202L HVPS Cable

• Chamber windows

• MV10A gas valve

• Tube Pressure sensor

• Beam Dump

• Beam Shutter

• HHT